The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Feb. 05, 2001
Applicant:
Inventors:
Eric Chu, Hsin-Chu, TW;
Kevin Chiang, Hsin-Chu, TW;
Ling-Hsin Tseng, Hsin-Chu, TW;
Ken Yew, Hsin-Chu, TW;
Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F25D 2/312 ;
U.S. Cl.
CPC ...
F25D 2/312 ;
Abstract
The present invention relates to a cooling system of a furnace, more particularly, to a multi-cycle cooling system, located by the furnace door. The probability of pollution by particles can be decreased and the lifetime of the furnace devices can be extended by using different liquid and gas cycles, cooling the different steps the semiconductor processes in the furnace.