The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 06, 2002
Filed:
Sep. 27, 2000
Other;
Abstract
A heat generating part ( ) of semiconductor manufacturing equipment is cooled by cooling water. An inner fluid passage ( ) having an inlet port ( ) of the cooling water on a vertically lower portion thereof is formed so as to surround a periphery of the heat generating part ( ). An outer fluid passage ( ) having an outlet port ( ) of the cooling water on a vertically upper portion thereof is formed so as to surround a periphery of the inner fluid passage ( ) and be capable of exchanging heat with the cooling water in the inner fluid passage. A communication passage ( ) is provided to connect a vertically upper portion of said inner fluid passage and a vertically lower portion of said outer fluid passage. The cooling water flowing out of the outlet port ( ) of the outer fluid passage ( ) is supplied to the inlet port ( ) of the inner fluid passage ( ).