The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 30, 2002
Filed:
Dec. 28, 1999
Applicant:
Inventors:
Matthew Ross, La Jolla, CA (US);
Heike Thompson, San Diego, CA (US);
Assignee:
Electron Vision Corporation, San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C08J 7/04 ;
U.S. Cl.
CPC ...
C08J 7/04 ;
Abstract
The invention pertains to dielectric films for the production of microelectronic devices. A spin-on glass film is produced by depositing a silazane polymer containing composition film onto a substrate and then exposing the film to electron beam radiation. The electron beam exposing step is conducted by overall exposing the dielectric layer with a wide, large beam of electron beam radiation from a large-area electron beam source.