The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Jul. 20, 1998
Rodney C. Langley, Boise, ID (US);
Micron Technology, Inc., Boise, ID (US);
Abstract
A cluster tool includes an inspection station for inspecting semiconductor wafers. The cluster tool includes a plurality of process/reaction chambers and an inspection chamber coupled thereto. A transport module provides a transport mechanism for transporting the semiconductor wafer from the process/reactio chamber to the inspection chamber. The inspection chamber includes a light source, a light receiver, and an image processor. The light source illuminates the semiconductor wafer with a beam of light and the receiver receives a reflected image. The processor processes the received image to detect a defect and provides a warning signal to an operator when a defect is detected.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile