The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Nov. 10, 2000
Applicant:
Inventors:
Willi Ulrich, Aalen-Dewangen, DE;
Helmut Beierl, Heidenheim, DE;
Assignee:
Carl-Zeiss-Stiftung, Heidenheim, DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 1/700 ; G02B 9/00 ;
U.S. Cl.
CPC ...
G02B 1/700 ; G02B 9/00 ;
Abstract
A catadioptric projection objective comprises an object plane, a physical beam splitter, a concave mirror, an image plane, a first objective part, a second objective part, and a third objective part. The first objective part is located between the object plane and the physical beam splitter. The second objective part is located between the physical beam splitter and the concave mirror, and includes at least two divergent lenses. The third objective part is located between the physical beam splitter and the image plane.