The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Sep. 15, 1998
Tokyo Ohka Kogyo Co., Ltd., Kanagawa, JP;
Abstract
A liquid chemical treatment apparatus includes a coating apparatus for applying a coating liquid such as resist onto the surface of a substantially planar substrate such as a glass substrate. The coating apparatus includes a nozzle with an elongate injection outlet such as a slit with a width substantially the same as that of the substrate, and a liquid circulating passage connected to the nozzle for supplying the coating liquid to the nozzle. Mechanisms are provided with the circulating passage and the nozzle to remove air from the liquid, and to maintain the circulating liquid at a substantially constant temperature and a substantially constant flow rate. When performing a coating operation with the coating liquid, a flow amount thereof is increased up to 1,500 though 3,000 ml/min, from a condition under which the liquid is prevented from dropping from the slit-like injection outlet while circulating within the circulating passage at a flow rate of 500 through 700 ml/min, for example, by closing a valve or by means of a pump 35 included with the passage. The liquid output from the slit-like injection outlet 4 takes on the form of a curtain to be applied over substantially the entire surface of the substrate, without any drops of the coating liquid remaining within the nozzle after the coating operation.