The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Apr. 13, 2000
Michael Abraham, Mainz, DE;
Ivo J. M. M. Raaijmakers, Bilthoven, NL;
Alain Gaudon, Launac, FR;
Pierre Astegno, Saint Jory, FR;
Other;
Abstract
Substrate measurement system including a measurement chamber ( ), and a substrate handling chamber ( ) possessing substrate transfer means ( ) and a substrate container interface ( ) arranged to receive a substrate container ( ), the handling chamber ( ) containing an interface ( ) to connect the measurement chamber ( ), the measurement chamber ( ) containing an interface ( ) to connect to the handling chamber ( ), and the transfer means ( ) being arranged to transfer substrates between the container ( ) and the measurement chamber ( ) through the handling chamber ( ), in which a second measurement chamber ( ) is provided, having the same interface ( ) as the first measurement chamber ( ) to replace the latter chamber ( ).