The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Mar. 17, 2000
Jeremy Isaac Martin, Austin, TX (US);
Advance Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
Damaged low-density silicon oxide-based films having an Si—O backbone are repaired using a method for driving a self-limiting healing process. According to an example embodiment of the present invention, a deposition precursor and an oxidizer are introduced to a damaged side wall region of a low-density silicon oxide-based film. The unstable damaged portion of the film reacts with the deposition precursor and a thin repair film is grown within the interfacial layer of the damaged film. The repair film provides a strengthened interface, protects the underlying sensitive material from further chemical damage, and can improve the ability to integrate the film.