The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Apr. 09, 2001
Applicant:
Inventors:
Melvin K. Holcomb, Grove City, OH (US);
William E. Barnes, Circleville, OH (US);
Steven L. Bardus, Westerville, OH (US);
Assignee:
Tosoh SMD, Inc., Grove City, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 2/000 ; C23C 1/434 ;
U.S. Cl.
CPC ...
B23K 2/000 ; C23C 1/434 ;
Abstract
Method of forming a two-piece hollow cathode sputter target assembly and the assembly formed thereby. The sputter target assembly includes an outer shell having a substantially cylindrical side wall and is composed of a relatively low purity metallic material. A sputtering insert includes a substantially cylindrical side wall and is concentrically received within, and bonded to, the outer shell. The sputtering insert is composed of a relatively high purity metallic material as used for depositing a thin layer or film onto a desired substrate.