The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 16, 2002
Filed:
Dec. 15, 1998
Kazutaka Yanagita, Yokohama, JP;
Takao Yonehara, Atsugi, JP;
Kazuaki Omi, Yokohama, JP;
Kiyofumi Sakaguchi, Yokohama, JP;
Cannon Kabushiki Kaisha, Tokyo, JP;
Abstract
This invention is to provide an apparatus for separating a substrate having a porous layer at the porous layer. A bonded substrate stack ( ) having a porous layer ( ) is supported by substrate holding portions ( ) while being rotated. High-speed, high-pressure water (jet) is ejected from a nozzle ( ), so the jet is injected into the bonded substrate stack ( ). The substrate holding portions ( ) hold the bonded substrate stack ( ) such that the bonded substrate stack ( ) can expand at its central portion due to the pressure of the injected water. This efficiently applies a force (separation force) that acts outward from the inside of the bonded substrate stack ( ).