The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Jul. 28, 1999
Noboru Kuriyama, Yokohama, JP;
Yutaka Yatsu, Sagamihara, JP;
Yoshio Kawamata, Zama, JP;
Takashi Fujii, Zama, JP;
Shibaura Mechatronics Corporation, KAnagawa-ken, JP;
Abstract
The present invention is such that, in a circuit for preventing an arc discharge through the application of a reverse voltage pulse, in the case where, after the application of the reverse voltage pulse has been ended, the generation of an arc discharge is detected by an arc discharge detecting means ( ), a reverse voltage generated by a reverse voltage generating means ( ) is applied within 1 to 10 &mgr;s to a sputtering source to lower the probability of generating a continuous arc discharge and, through a diode (D ) connected in series with the sputtering source ( ) and a resistor (r ) connected in parallel with the diode (D ), a current at a time of applying the reverse voltage is restricted, thus lowering a continuous arc discharge resulting from the reverse arc discharge.