The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 09, 2002

Filed:

Mar. 19, 1999
Applicant:
Inventor:

Katsuhiro Matsuyama, Hachioji, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 5/28 ; H01L 2/1465 ;
U.S. Cl.
CPC ...
G01B 5/28 ; H01L 2/1465 ;
Abstract

A cantilever for use in a scanning probe microscope includes a lever portion having a probe portion made from a semiconductor substrate. The length and thickness directions of the lever portion are parallel to a top surface of the semiconductor substrate, and a width direction of the lever portion corresponds to a thickness direction of the semiconductor substrate. The probe portion is triangular or substantially triangular pyramid shaped having three faces, two of which are made of crystal and a remaining one of which is formed by an artificial process.


Find Patent Forward Citations

Matsuyama, Katsuhiro. (2002). Cantilever for use in a scanning probe microscope (U.S. Patent No. 6415653). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6415653

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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