The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
May. 03, 2000
Shijian Li, San Jose, CA (US);
John M. White, Hayward, CA (US);
Lawrence M. Rosenberg, San Jose, CA (US);
Martin Scales, San Jose, CA (US);
Ramin Emami, San Jose, CA (US);
James V. Tietz, Fremont, CA (US);
Manoocher Birang, Las Gatos, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A semiconductor substrate processing system for polishing a substrate that generally includes a platen and a web of polishing material disposed thereon. Embodiments of the system include a disposable cartridge for housing the web of polishing material, a shield member disposed proximate the web for preventing contamination of the unused portion of the web, a fluid delivery for fixing and freeing the web from the platen, apparatus for controlling the lateral movement of the web, and an apparatus for providing more linear feet of polishing material per height of a roll.