The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 02, 2002

Filed:

Jun. 15, 1999
Applicant:
Inventors:

Kensaku Motoki, Itami, JP;

Takuji Okahisa, Itami, JP;

Naoki Matsumoto, Itami, JP;

Tatsuya Nishimoto, Itami, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 5/16 ; C01B 2/106 ; C30B 2/938 ;
U.S. Cl.
CPC ...
B32B 5/16 ; C01B 2/106 ; C30B 2/938 ;
Abstract

A freestanding GaN single crystal substrate is made by the steps of preparing a (111) GaAs single crystal substrate, forming a mask having periodically arranged windows on the (111) GaAs substrate, making thin GaN buffer layers on the GaAs substrate in the windows of the mask, growing a GaN epitaxial layer on the buffer layers and the mask by an HVPE or an MOC, eliminating the GaAs substrate and the mask away and obtaining a freestanding GaN single crystal substrate. The GaN single crystal has a diameter larger than 20 mm and a thickness more than 0.07 mm, being freestanding and substantially distortion-free.


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