The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Dec. 06, 2000
Hiroshi Mizuno, Gresham, OR (US);
Masaaki Ogitsu, Tsukuba, JP;
Takuya Nagamine, Shimotsuma, JP;
Toru Kikuchi, Sekijyou-machi, JP;
LSI Logic Corporation, Milpitas, CA (US);
Abstract
A polishing table in the CMP apparatus has a diameter smaller than the diameter of a polishing pad The polishing pad is disposed on the polishing table so as to cover the entire top surface of the polishing table A space is formed between outside of the outer peripheral surface of the polishing table and under the outer peripheral bottom surface portion of the polishing pad projecting outside from the edge of the polishing table A trough with an opening on top thereof as a device for withdrawing the used slurry is disposed around the outer peripheral surface of the polishing table so as to be located a part thereof in the space