The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Apr. 13, 2000
Applicant:
Inventor:
Shigeki Nishina, Tokyo, JP;
Assignee:
Advantest Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 3/18 ;
U.S. Cl.
CPC ...
G01J 3/18 ;
Abstract
The monochromator and the spectrometric method are disclosed wherein the measured beam converted into a parallel beam by a first collimator is diffracted by a plane diffraction grating, then the diffracted beam is returned so that the diffracted beam after the return is separated from that before the return along rulings of the plane diffraction grating, the diffracted beam is diffracted again by the plane diffraction grating, then the beam condensed by a second collimator is allowed to pass through an exit slit.