The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 25, 2002
Filed:
Sep. 21, 2000
Applicant:
Inventors:
Patrick T. Chin, Marina del Rey, CA (US);
Todd K. Makishi, Harbor City, CA (US);
Thomas R. Block, Los Angeles, CA (US);
Assignee:
TRW Inc., Redondo Beach, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 9/00 ; B08B 7/00 ;
U.S. Cl.
CPC ...
B08B 9/00 ; B08B 7/00 ;
Abstract
A method for cleaning phosphorus from a MBE vacuum chamber by freezing the panel ( ) placed within the vacuum chamber ( ) onto which excess phosphorus is deposited. The panel is connected to a source of cold nitrogen ( ) which cools the panel. Water is introduced after the panels are cooled so as to form a layer of ice on top of the phosphorus. The panel may then be removed for cleaning with ice covering the phosphorus without danger of ignition of the phosphorus.