The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Jun. 24, 1999
Isamu Seto, Tokyo, JP;
Advantest Corporation, Tokyo, JP;
Abstract
Pattern data correction controllers 64 are provided one for each column, correction operation processing is performed on exposure data according to the characteristics of each corresponding column, the operation processing time corresponding to the exposure processing cycle required in the corresponding column is computed from data SD , SCD , WDM , WDS indicating a per-shot exposure time, exposure time correction value, and settling waiting time generated based on the correction operation processing, a maximum value is detected from among the operation processing times computed by the respective pattern data correction controllers and, based on data PCD representing the operation processing time of the maximum value thus detected, an operation processing clock CK is generated and supplied to correction operation processing blocks to in the respective pattern data correction controllers.