The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Apr. 18, 2000
Applicant:
Inventor:
Jürgen Frosien, Riemerling, DE;
Assignee:
Advantest Corp., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/726 ; H01J 3/7145 ;
U.S. Cl.
CPC ...
H01J 3/726 ; H01J 3/7145 ;
Abstract
The invention relates to a corpuscular beam device with an objective lens for focussing a primary particle beam onto a specimen and a detector for detecting secondary and/or backscattered particles released at the specimen. Furthermore, there is a sieve electrode arranged above the specimen which has a central hole for the primary particle beam and a plurality of additional holes for the secondary and/or backscattered particles.
Frosien, Jürgen. (2002). Corpuscular beam device (U.S. Patent No. 6407388). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6407388
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile