The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Dec. 01, 1999
Eiichi Toya, Oguni-machi, JP;
Tomio Konn, Oguni-machi, JP;
Tomohiro Nagata, Oguni-machi, JP;
Norihiko Saito, Oguni-machi, JP;
Shigeru Yamamura, Oguni-machi, JP;
Ken Nakao, Sagamihara, JP;
Takanori Saito, Sagamihara, JP;
Hisaei Osanai, Sagamihara, JP;
Toshiyuki Makiya, Tokyo, JP;
Other;
Abstract
A rod-shaped heater provided is composed of a carbon wire heating element sealed in a small or large diameter quartz glass tube, a small diameter quartz glass tube portions and charged with compressed wire carbon members at opposite ends thereof; a sealed terminal section having connection lines and for power supply held between the compressed wire carbon members charged in the small diameter quartz glass tube. The connection lines and the carbon wire heating element are electrically connected by way of the wire carbon members. This rod-shaped heater using the carbon wire heating element is suitable for readily raising the temperature of the agent in the storage tank of the wet etching agent or the grinding agent.