The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 18, 2002
Filed:
Oct. 25, 1999
Norio Kimura, Tokyo, JP;
Hirokuni Hiyama, Kanagawa, JP;
Yutaka Wada, Kanagawa, JP;
Kiyotaka Kawashima, Tokyo, JP;
Manabu Tsujimura, Tokyo, JP;
Takayoshi Kawamoto, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The object of the present invention is to provide a polishing apparatus that can supply a polishing solution having a non-varying distribution of abrading particles sizes at a steady rate. An apparatus ( ) for delivering a polishing solution to a polishing apparatus ( ) is disclosed. The apparatus ( ) comprises: a solution passage for transporting the polishing solution; and an ultrasonic vibrator ( ) being provided in at least one location of the solution passage.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile