The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 04, 2002
Filed:
Apr. 15, 1999
Applicant:
Inventors:
Gordon M. Babson, Williston, VT (US);
Anthony M. Palagonia, Underhill, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract
A monolithic probe having an integral fine probe point, pressure spring, conductive line, and connector for contacting semiconductor devices to be tested and a method of construction of said probe is described. Integration of a serpentine spring into the probe body reduces breakage and improves contact reliability. Standard, coaxial, triaxial, and Kelvin probes are described. The methods of construction described utilize standard semiconductor processes. The probes may be fabricated to very small dimensions.