The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2002
Filed:
Apr. 13, 2000
Keiichi Tanaka, Nirasaki, JP;
Shinsuke Asao, Kosai-Machi, JP;
Masahito Ozawa, Yamanashi-ken, JP;
Masaki Sohma, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
A process system comprises cassette housing chambers A and B, each of which houses therein a cassette C having housed an object W to be processed, and process chambers A through D for carrying out a predetermined process for the object W. The cassette housing chambers A and B are connected to the process chambers A through D via a transfer chamber . In the transfer chamber , there are provided a first transfer unit for delivering the object W between the cassette housing chambers A and B and the transfer chambers A through D, and a second transfer unit for delivering the object W between the process chambers A through D and the transfer chamber . In the overlapping range of transfer ranges of the first and second transfer units and , an aligning unit for aligning the object W is arranged.