The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2002
Filed:
Dec. 20, 1999
Paul R. Marsden, San Diego, CA (US);
David R. Williams, Temecula, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A cart for the changeout of modules such as a laser chamber module. In one example, the cart includes at least two platforms that are movable with respect to a frame of the cart and that are coupled together such that an upward force for a vertical movement with respect to the frame of one platform provides a vertical movement with respect to the frame of a second platform at an elevated position. The platforms are coupled to each other with chains, wire, or linkage structures. With some carts, the platforms are removable from the rest of the frame. Also with some carts, an upper platform is collapsible on a lower platform. Some carts include two wheel bases that are foldable with respect to one another so as to allow the cart to traverse a surface obstacle by folding one wheel base down over the surface obstacle and transferring a load to that wheel base from another wheel base located on the opposite side of the surface obstacle. Some cart platforms include rail structures that allow a module to be moved from the platform to a system housing such as a laser system housing.