The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 28, 2002
Filed:
Feb. 23, 1998
Applicant:
Inventors:
Toshiyuki Sakemi, Niihama, JP;
Masaru Tanaka, Niihama, JP;
Shunji Wada, Tsukuba, JP;
Etsuo Ogino, Tsukuba, JP;
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 1/600 ;
U.S. Cl.
CPC ...
C23C 1/600 ;
Abstract
A correction mechanism including a magnetic body ( ) is placed at a position between a vacuum chamber ( ) and a steering coil ( ) and where line of magnetic force generated from the steering coil is present, to correct torsion and/or bias of a plasma beam.