The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Feb. 29, 2000
Applicant:
Inventors:
Paolo Zambon, San Diego, CA (US);
Gamaralalage G. Padmabandu, San Diego, CA (US);
Tom A. Watson, Carlsbad, CA (US);
Palash P. Das, Vista, CA (US);
Assignee:
Cymer, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/772 ; G03B 2/754 ; G03B 2/732 ; H01S 3/22 ;
U.S. Cl.
CPC ...
G03B 2/772 ; G03B 2/754 ; G03B 2/732 ; H01S 3/22 ;
Abstract
A lithograph quality optimization process for controlling laser beam parameters when changing operating modes. The laser is programmed to automatically conduct an optimization procedure preferably in less than one minute to adjust laser operating parameters such as blower speed, total gas pressure and F partial pressure in order to optimize beam quality parameters.