The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Aug. 02, 2000
Applicant:
Inventors:
Assignee:
Samsung Electronics Co., Ltd., Kyungki-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/144 ;
Abstract
The present invention uses an ultraviolet ray to clean PCBs in packaging semiconductors, instead of using a plasma gas. Since the ultraviolet ray cleaning does not require a vacuum condition around an ultraviolet ray lamp, a guide belt for conveying the PCBs can be freely installed in such a manner that an ultraviolet ray cleaning tool and fabricating equipment are arranged in-line. This results in an in-line arrangement of an ultraviolet ray cleaning chamber and the fabricating equipment. Therefore, the PCBs can be introduced into fabricating processes immediately after cleaning and a long standby time problem of the PCB outside of the fabricating equipment is solved.