The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Feb. 02, 2000
Applicant:
Inventor:
Arie J. den Boef, Waalre, NL;
Assignee:
ASM Lithography B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/772 ; G03B 2/742 ; G03B 2/754 ; G01B 9/02 ;
U.S. Cl.
CPC ...
G03B 2/772 ; G03B 2/742 ; G03B 2/754 ; G01B 9/02 ;
Abstract
In an interferometric alignment system provides an alignment signal for reproducibly registering a reticle with a wafer . The radiation from a laser , which is the illumination source for the interferometer, is modulated by a phase modulator to eliminate spurious noise from the alignment signal.