The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Feb. 07, 2000
Kerry Bernstein, Underhill, VT (US);
Nicholas Theodore Schmidt, Colchester, VT (US);
Anthony K. Stamper, Williston, VT (US);
Stephen Arthur St. Onge, Colchester, VT (US);
Steven Howard Voldman, South Burlington, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An integrated circuit interconnect level capacitor is disclosed. In an exemplary embodiment, the capacitor includes a first insulator layer overlying an interconnect level surface of a semiconductor substrate having active devices. First and second conductive lines are provided in the first insulator layer and are separated by a trench defined by the first insulator layer and by sidewalls of the first and second conductive lines. A first conductive barrier layer overlies and connects the first and second conductive lines, and a second insulator layer overlies the first conductive barrier layer. A second conductive barrier layer overlies the second insulator layer, and a third conductive line is disposed in the trench and overlies the second conductive barrier layer.