The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
May. 04, 2000
Applicant:
Inventors:
Shinichi Namioka, Tokyo, JP;
Takaaki Inoue, Tokyo, JP;
Assignee:
Disco Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23Q 3/10 ;
U.S. Cl.
CPC ...
B23Q 3/10 ;
Abstract
A chuck table includes a pedestal having a circular depression formed in an upper surface thereof, and a disk-like chuck plate positioned in the depression of the pedestal. The chuck plate is fixed in the depression of the pedestal by means of an adhesive interposed between a bottom surface of the depression of the pedestal and a lower surface of the chuck plate. A recess for accepting a surplus of the adhesive is formed in a lower end portion of a side surface of the depression of the pedestal.