The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2002
Filed:
Jun. 20, 2001
Applicant:
Inventors:
Masaaki Ikeda, Utsunomiya, JP;
Ichiro Yoshimura, Ustonomiya, JP;
Assignee:
MEMC Electronic Materials, Inc., St. Peters, MO (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B24B 1/00 ;
U.S. Cl.
CPC ...
B24B 1/00 ;
Abstract
To provide a method for storing a carrier ( ) for polishing a silicon wafer, which can store the carrier ( ) in a manner to reduce scratches on the silicon wafer. The method includes storing a carrier ( ) for use in polishing a silicon wafer completely immersed in a liquid. At least a substantial portion of the liquid is deionized water.
Ikeda, Masaaki. (2002). Method for storing carrier for polishing wafer (U.S. Patent No. 6379226). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6379226
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile