The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2002
Filed:
Sep. 21, 2000
Mehrdad M. Moslehi, Los Altos, CA (US);
CVC Products, Inc., Rochester, NY (US);
Abstract
A chuck having two distinct portions mounts a substrate within a vacuum processing chamber. A first sealing stage confines a gas within a heat-transfer interface between one portion of the chuck and the substrate. A second sealing stage collects gas escaping from the heat-transfer interface within an intermediate space bounded by the two portions of the chuck and the substrate. Pressure in the intermediate space is reduced with respect to pressure at the heat-transfer interface to inhibit leakage of gas from the heat-transfer interface into the vacuum processing chamber.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile