The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2002
Filed:
May. 22, 2000
Takashi Takekuma, Austin, TX (US);
Tokyo Electron Limited, Tokyo, JP;
Abstract
A substrate processing apparatus comprises a cassette section for loading/unloading plural cassettes, a first sub-arm mechanism provided in the cassette section, a first block having plural coating units, an interface section provided adjacent to a second block for exposing, a third block having plural developing units, a first main arm mechanism provided in the first block to allow the substrate to be passed to and from the first sub-arm mechanism and to be inserted into and taken out from the coating unit, a third main arm mechanism provided in the third block to allow the substrate to be passed to and from the first main arm mechanism and to be inserted into and taken out from the developing unit, a second sub-arm mechanism provided in the interface section to allow the substrate to be passed to and from the third main arm mechanism and to be passed to and from the second block, a forward bypath having one end extending toward the neighborhood of the cassette section and the other end extending toward the neighborhood of the interface section, and a forward direct feeding mechanism receiving the substrate from the first main arm mechanism and directly feeding the substrate from the first block to the interface section.