The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2002
Filed:
Oct. 05, 2000
Hidekimi Kadokura, Tokyo, JP;
Yumie Okuhara, Sakado, JP;
Kabushikikaisha Kojundokagaku Kenkyusho, Tokyo, JP;
Abstract
There is provided a compound for the formation of a PZT film using Pb(dpm) where the compound has a low reactivity with Pb(dpm) , has a thermal decomposition temperature which is lower than Zr(dpm) and is well soluble in a solvent such as butyl acetate and toluene. There is also provided a process for the manufacture of the compound. There is further provided a liquid composition for the formation of a PZT film using the compound. The novel compound Zr(OiPr)(dpm) has a sublimation pressure of 0.1 Torr/160° C. and is able to form a ZrO film by a CVD at 400° C. That can be prepared by the reaction of 1 mol of Zr(OiPr) and 3 mol of dpmH in an organic solvent followed by purifying by sublimation. A solution of Pb(dpm) , Zr(OiPr)(dpm) and Ti(OiPr) (dpm) dissolved in butyl acetate has a long pot life and forms a PZT film by a solution flash CVD method.