The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 23, 2002
Filed:
Dec. 30, 1998
Jung-Chao Chiou, Hsinchu, TW;
Hsiao-Pang Chou, Taipei Hsien, TW;
United Microelectronics Corp., Hsinchu, TW;
Abstract
A method for forming an opening is provided. The method contains forming a dielectric layer on the substrate. The dielectric layer is patterned to form a first-stage opening. A carbonic-polymer (C-polymer) concentration controlling treatment is performed to obtain a proper C-polymer concentration, which can be raised, reduced, or even down to a zero concentration. After the proper C-polymer concentration is obtained, a next-stage opening is formed by another step of etching. The C-polymer concentration controlling treatment and the etching process with a new condition for each step can be repeated until a desired opening is formed.