The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Dec. 08, 2000
Applicant:
Inventors:
Hsin-Hui Hsu, Hsin-Chu, TW;
De-Yuan Wu, Hsin-Chu, TW;
Assignee:
United Microelectronics Corp., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
U.S. Cl.
CPC ...
H01L 2/1302 ; H01L 2/1461 ;
Abstract
The present invention provides a method of reducing resistance in an Al-containing conductor. An Al oxide layer is first formed on the surface of an Al-containing conductor followed by the formation of a Ti layer and a barrier layer above the Al oxide layer, respectively. Finally, a W contact plug is formed within the barrier layer. The Al oxide layer functions in preventing a reaction between the Ti layer and the conductor during high temperature formation of the W contact plugs to avoid the influence of resistance in the Al-containing conductor.