The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Dec. 14, 2000
Applicant:
Inventors:
Yuk Cheung Au, Kwai Chung, HK;
Man Wai Chan, Kwai Chung, HK;
Assignee:
ASM Assembly Automation Ltd., Hong Kong, HK;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B67D 3/00 ;
U.S. Cl.
CPC ...
B67D 3/00 ;
Abstract
Fluid dispensing apparatus for dispensing small precise metered quantities of fluid, for example in a semiconductor manufacturing process, comprises two metering chambers disposed in series. Each metering chamber has an associated piston rod and fluid is dispensed therefrom alternately. Twice the volume of fluid is displaced from the upstream metering chamber so that when it dispenses fluid at the same time it can refill the second downstream metering chamber.