The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2002
Filed:
Oct. 19, 2000
Applicant:
Inventors:
Michael Trunz, Pfahlheim, DE;
Bernhard Gellrich, Aalen, DE;
Assignee:
Carl-Zeiss Stiftung, Heidenheim, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 7/02 ;
U.S. Cl.
CPC ...
G02B 7/02 ;
Abstract
In a method of straightening the supporting surfaces ( ) of supporting elements ( ) for optical elements ( ), in particular in lens systems of microlithography projection exposure equipment, the supporting elements ( ) and/or at least one bearing part ( ) connected to the supporting elements ( ) for the optical elements ( ) are deformed by a laser beam (A, B, C, D) produced by a laser ( ) in such a way that the supporting surfaces ( ) are at least approximately aligned with a common supporting plane or some other prescribed distribution.