The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 02, 2002
Filed:
Oct. 01, 1999
Hoon-Yeng Yap, Tempe, AZ (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
A wafer transport cart comprises a wheeled support structure and an upright member which is pivotably coupled to the support structure. The upright member has a handle which is pivotably coupled to a wafer cassette support, which comprises a pair of fork-like arms. Wafer production personnel can maneuver the cart adjacent a wafer manufacturing load port, and unload a wafer cassette from the cart to the load port or vice versa, by employing movements of the upright member and the handle. Shock-absorbing dampers are provided for the upright member and the handle. An inter-cart coupling mechanism enables a plurality of carts to be joined together for tandem transport within the manufacturing facility. The arms mate with mating regions on the wafer cassette and on the load port. An alignment notch mates with an alignment pin on the load port. Also described are methods of using the wafer transport cart to load and unload a wafer cassette.