The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Sep. 02, 1999
Applicant:
Inventors:
Ichiro Mizushima, Yokohama, JP;
Mariko Takagi, Kawasaki, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/176 ;
U.S. Cl.
CPC ...
H01L 2/176 ;
Abstract
In A MIS type semiconductor device using a polycrystalline silicon film as a gate electrode, a lower portion of the polycrystalline silicon film has larger grains in average diameter than an upper portion thereof, and there is no peak of oxygen concentration in a film thickness direction in the polycrystalline silicon film.