The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Dec. 22, 1999
Applicant:
Inventors:
Larry Clevenger, LaGrangeville, NY (US);
Roy C. Iggulden, Newburgh, NY (US);
Rainer F. Schnabel, Höehenkirchen, DE;
Stefan Weber, Fishkill, NY (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 1/500 ;
U.S. Cl.
CPC ...
B32B 1/500 ;
Abstract
A method is provided in which intermediate sized structures can be filled without forming voids during the fill process. The methods involve use of a sequence of CVD/PVD/CVD/PVD steps. The methods are especially effective for filling “intermediate” size features in damascene and dual damascene structures.