The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 26, 2002
Filed:
Dec. 01, 2000
Hang-Chang Lee, Tao-Yuan, TW;
Long Chun Tsai, Hsin-chu, TW;
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu, TW;
Abstract
A static mixer for a viscous liquid for use in a chemical mechanical polishing process is provided. The static mixer is constructed of an elongated cylindrical tank, an elongated cylindrical mixing sleeve having a multiplicity of mixing apertures therethrough situated inside the tank, a plurality of curvilinear feed tubes situated at a top of the tank cavity for feeding a mixture of a viscous liquid and a solvent into the tank cavity, a spiral plate mounted on the interior surface of the tank wall extending continuously from a top wall to a bottom wall of the tank cavity, and an outlet tube that is situated at the bottom of the tank cavity inside the mixing sleeve for outputting a mixture.