The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2002
Filed:
Nov. 25, 1998
Shigetaka Kumashiro, Tokyo, JP;
NEC Corporation, , JP;
Abstract
In this semiconductor process device simulation method, a coefficient matrix constituted by a principal diagonal submatrix arranged at any one of principal diagonals corresponding to each mesh point and representing a self feedback function at the mesh point, the principal diagonal submatrix having rows and columns in numbers corresponding to the number of mesh points, and a non-principal diagonal submatrix arranged on any one of a row and column passing through principal diagonal positions corresponding to the mesh point and representing an interaction between the mesh point corresponding to the principal diagonal positions and an adjacent mesh point connected to the mesh point through a mesh branch is generated. Calculation for the submatrices is performed while regarding each submatrix of the coefficient matrix as one element, thereby performing incomplete LU factorization of the coefficient matrix.
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