Two-sided substrate imaging using single-approach projection optics

Abstract

Apparatus and method for side-by-side scanning of a substrate to use a single-approach projection optical system to provide a patterned image on each of two surfaces of a substrate panel, and more particularly a technique for pattern scanning a first surface, reverse, of the substrate panel at a reverse patterning station, flipping the substrate panel over and repositioning the substrate panel at the same or another location for patterning the opposite surface, obverse. This provides access to a second surface of the substrate panel for pattern scanning, and positions another substrate panel at the first station. The flipping mechanism may be a simple grabber/retractor with a rotatable wrist for substrate inverting. The forwarder may be a simple shuttle mechanism. Inexpensive standard pick-and-place loader/unloader mechanisms may be used for loading and unloading. To reduce the number of substrate handling mechanisms, however, it may be economical for individual robots to perform multiple substrate panel handling tasks. Substrate forwarding on the stage carriage may be by pick-and-place mechanisms, slide/shuttle mechanisms or carousel.