The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2002
Filed:
Jun. 12, 2000
Applicant:
Inventor:
Jeremy Lansford, Austin, TX (US);
Assignee:
Advanced Micro Devices, Inc., Austin, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/126 ; H01L 2/100 ;
U.S. Cl.
CPC ...
G01R 3/126 ; H01L 2/100 ;
Abstract
In one illustrative embodiment, the method disclosed herein comprises forming a process layer above a semiconducting substrate, forming a layer of photoresist above the process layer, removing the layer of photoresist by performing an etching process, and determining an endpoint of the etching process based upon a temperature of the substrate.