The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2002
Filed:
Nov. 02, 2000
Naoki Kasai, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
The present invention also provides a multilevel interconnection structure comprising: at least a set of a first lower level contact plug extending in a lower level inter-layer insulator structure and a first higher level contact plug extending in a higher level inter-layer insulator structure extending over the lower level inter-layer insulator structure, wherein a top of the first lower level contact plug is contact directly with a bottom of the first higher level contact plug without intervening any interconnection pad; a stopper insulating film extending between the lower level inter-layer insulator structure and the higher level inter-layer insulator structure; and at least a lower-level single conductive united structure which further comprises: a second lower level contact plug extending in the lower level inter-layer insulator structure; and a first lower level interconnection extending in a lower-level interconnection groove formed in an upper region of the lower level inter-layer insulator structure, wherein a top surface of the first lower level interconnection is leveled to a top surface of the lower level inter-layer insulator structure and also leveled to the top of the first lower level contact plug.