The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2002
Filed:
Nov. 29, 1999
Applicant:
Inventors:
Yi-Jen Chen, Hsin-Chu Tai an, TW;
Guey-Shyung Cho, Hsin-Chu, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd, Hsin Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G08B 2/100 ;
U.S. Cl.
CPC ...
G08B 2/100 ;
Abstract
A pod for transporting a cassette containing semiconductor wafers includes a base and a cover removably carried on the base for protectively enclosing the cassette. A latching mechanism for latching the cover on the base is provided with an electrical sensor that senses when the cover is properly latched on the base and controls an electrical light on the base to provide a visual indication of latch status.