The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2002
Filed:
Nov. 30, 1998
Wolfgang Arndt, Heilbronn, DE;
Klaus Graff, Heilbronn, DE;
Alfons Hamberger, Gundelsheim, DE;
Petra Heim, Heilbronn, DE;
Abstract
A process for manufacturing a silicon semiconductor device having a reduced surface recombination velocity of charge carriers within a silicon wafer includes forming a plurality of semiconductor zones in the surface; reducing surface recombination velocity of charge carriers within the silicon wafer by maintaining temperature below 100° C. while sequentially performing the steps of cleaning the surface to remove oxide; drying the surface by blowing a non-oxidizing gas thereon; directly applying a layer of lacquer onto the surface at a temperature below 100° C.; and drying the layer of lacquer at a temperature below 100° C. to generate an electrically non-conducting layer and reduce the surface recombination velocity of charge carriers within the silicon wafer in which the layer of lacquer contains halogen in a concentration of more than 0.1 volume %; and forming at least one conducting structure on the surface of the layer of lacquer.