The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2002
Filed:
Apr. 30, 1999
Richard J. Lebel, Williston, VT (US);
Rock Nadeau, Jericho, VT (US);
Martin P. O'Boyle, Cortlandt Manor, NY (US);
Paul H. Smith, Jr., Essex Junction, VT (US);
Theodore G. van Kessel, Millbrook, NY (US);
Hemantha K. Wickramasinghe, Chappaqua, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A structure and method for polishing a device include oscillating a carrier over an abrasive surface (the carrier bringing a polished surface of the device into contact with the abrasive surface, the oscillating allowing a portion of the polished surface to periodically oscillate off the abrasive surface), optically determining a reflective measure of a plurality of locations of the polished surface as the portion of the device oscillates off the abrasive surface and calculating depths of the locations of the polished surface based of the reflective measure.