The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Apr. 21, 2000
Vladimir Ivanovich Kuznetsov, Delft, NL;
Ernst Hendrik August Granneman, Hilversum, NL;
A.S.M. International N.V., Bilthoven, NL;
Abstract
Floating wafer provided with heating elements which, by means of a controller, keep the walls of the floating wafer reactor at the desired temperature. By means of the sensors arranged in the walls, this temperate is kept substantially constant. To compensate for the temperature drop occurring during the entering of a wafer, which is caused by the absorption of warmth by the comparatively cold wafer, and to limit temperature variation in the processing area as much as possible, it is proposed to immediately supply an amount of energy to the heating elements, independently of the reaction of the sensors, during entering of the wafer.